Briefs & Presentations
This section includes the latest brochures, briefs and presentations on SMI products and systems.
• Introducing the GaNomite™ A new series of SpinCVD™ reactors and systems for GaN film deposition.
• Custom Frames A complete line of frame design and manufacturing capabilities focused on supporting advanced research and manufacturing tools.
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Brochures
SMI
Services
Spin CVD™: SMI System Assemblies Ganomite Dragon
Hollow Cathode Gas Flow
Material & Process Development and Material Demonstration
Featured Material: Zn(Mg)O
Perovskite Complex Oxide Films by SpinCVD™
Flash Evaporators and Liquid/Vapor Delivery Systems
SMI Vapor Delivery Systems
Technical Monographs
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MOCVD of GeSbTe-based Chalcogenide Thin Films
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Chalcogenides for Phase Change Memory Applications
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Vacumn and Coating Magazine - Preparation of Complex Oxide Thin Films by MOCVD
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Large Area Multi-Wafer MOCVD of Transparent and Conducting ZnO Films
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MOCVD Process Model for Deposition of Complex Oxide Ferroelectric Thin Films
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Metal Organic Chermical Vapor Deposition of Oxide Films for Advanced Applications
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Interactive Process Control Industrial Computer System (ICCS) for MOCVD and Other Process Systems
Laser annealing of MOCVD Deposited Ferroelectric SrBi2Ta2O9, Pb(ZrxTi1-x)O3, and CeMnO3 Thin Films
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