Briefs & Presentations
This section includes the latest brochures, briefs and presentations on SMI products and systems.
• Introducing the GaNomite™ A new series of SpinCVD™ reactors and systems for GaN film deposition.
• Custom Frames A complete line of frame design and manufacturing capabilities focused on supporting advanced research and manufacturing tools.
Brochures
SMI
Services
Spin CVD™: SMI System Assemblies Ganomite Dragon
Hollow Cathode Gas Flow
Material & Process Development and Material Demonstration
Featured Material: Zn(Mg)O
Perovskite Complex Oxide Films by SpinCVD™
Flash Evaporators and Liquid/Vapor Delivery Systems
SMI Vapor Delivery Systems
Technical Monographs
MOCVD of GeSbTe-based Chalcogenide Thin Films
Chalcogenides for Phase Change Memory Applications
Vacumn and Coating Magazine - Preparation of Complex Oxide Thin Films by MOCVD
Large Area Multi-Wafer MOCVD of Transparent and Conducting ZnO Films
MOCVD Process Model for Deposition of Complex Oxide Ferroelectric Thin Films
Metal Organic Chermical Vapor Deposition of Oxide Films for Advanced Applications
Interactive Process Control Industrial Computer System (ICCS) for MOCVD and Other Process Systems
Laser annealing of MOCVD Deposited Ferroelectric SrBi2Ta2O9, Pb(ZrxTi1-x)O3, and CeMnO3 Thin Films