Vapor Delivery System / Filters / Condensers
SMI has evolved a variety of filtration assemblies for MOCVD (or other) systems. SMI has also developed exhaust system solvent condensers. SMI has developed a proprietary Flash Evaporator, as shown on left, which can operate from RT to 350°C under UHV standards. Further, to support Flash Evaporation operation, a sophisticated liquid delivery system, as shown schematically at right, which includes temperature controlled vapor delivery lines.