SMI offers a wide range of showerheads for static and Rotating Disc Reactor (RDR) deposition systems based on our patented design. Available sizes range from 6” to 34” with or without plasma; optical ports or other custom features are easily added in. Typical showerheads are of metal and ceramic construction and can be made height adjustable as an option.
SMI standard RDR showerheads feature large linear windows, ability to provide plasma launching electrodes, cooling channels, uniform background flow, concentric or wedge shaped reactive flows including provision for maintaining separations of reactive flow gauges through the showerhead. Showerhead vacuum sealing mechanisms include metal seals as well as single and dual O-ring configurations.