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About SMI

Structured Materials Industries MOCVD System Developer
Structured Materials Industires About

Structured Materials Industries, Inc. (SMI) provides custom solutions for quality made cost-effective CVD tools, components, device structures and materials. Since 1992, we have worked with researchers, developers, and entrepreneurs to generate custom solutions that meet their needs and thereby giving them with a competitive advantage. Our company has an in-house applications development laboratory and has grown over 60 different materials. The company is staffed with experienced professionals providing technical assistance for demonstrations, process development, tool or component customization, installation and implementation, and product production.

The company is well versed in thin film deposition techniques including: 

  • Chemical Vapor Deposition (CVD)

  • Metal Organic Chemical Vapor Deposition (MOCVD)

  • Plasma Enhanced CVD (PECVD)

  • Alternating Layer Deposition (ALD)

  • High Pressure CVD (HPCVD)

  • Hydride Vapor Phase Epitaxy (HVPE) 

SMI has worked on various projects including but not limited too: ​

  • Oxides

  • Nitrides

  • Sulfides 

  • Carbides 

  • CNTs, Graphene, Nanowires, etc

  • Chalcogenides

  • Metals

  • Diamonds 

  • Compound Semiconductors 

  • Optical Coatings 

SMI is made up of experienced and high skilled professionals. The company is staffed with Scientists, Engineers, Technicians, Administrators, and Consultants. For additional information,please refer to our careers page. 


Dr. Gary S. Tompa, President and Chief Executive Officer

As President and C.E.O. of SMI, Dr. Tompa leads the company, technology development, and commercialization. With over 30 years of experience, his major areas of expertise are thin film making equipment, devices, nanomaterials, business growth and management, and financing approaches. Dr. Tompa started his career in CVD by rising to Director of Systems and Technology at the Turbo Disc division of Emcore (now owned by Veeco) from which he left to found Structured Materials Industries, Inc. (SMI). At SMI, Dr. Tompa is a concurrent entrepreneur, having helped found several businesses and raised over $40 million dollars in non-equity financing. He is also a founder of the NEI Corporation and currently serves as the Chairman of NEI’s Board of Directors. Dr. Tompa is a co-founder of United Nanotech Products Limited, a multi-million dollar private venture funded start-up to produce battery electrode materials, where he was a member of the board of directors. Dr. Tompa also sits on several University Boards of Advisors. He has also been an external committee member to several PhD. theses ,has over 100 publications, has made over 100 conference presentations,  and is the holder of several patents. Dr. Tompa is a member of several societies, including, at times, OSA, MRS, TMS, and NDIA, among others. Dr. Tompa, a Garden State (New Jersey) Fellow, holds a PhD. in Physics from Stevens Institute of Technology.

L. Gary Provost, Engineering Manager

With over 20 years at SMI, Mr. Provost  has led several BMDO awarded SBIR projects in the area of oxide thin films produced by Metal Organic Chemical Vapor Deposition. Since joining SMI he has built and modified several in-house MOCVD reactors and systems, including the assembly and implementation of liquid delivery flash evaporators and process control systems. He also has hands-on knowledge and experience growing ZnO and other metal oxides, including ferroelectrics, dielectrics, and pyroelectrics and in supporting and maintaining tools. Mr. Provost has also developed data control and reporting procedures. He also directed the development of COVA Technology, Inc’s line of flash evaporators. Mr. Provost holds a Bachelors of Science in Electrical Engineering Technology from Northeastern University. 

Structured Materials Industries Dr. Tompa

SMI International Commitment to Customer Excellence

Over 60 tools fielded to a worldwide customer base. 

Structured Materials Industries Custome
SMI Customer Map 1-4-2019.jpg

Over 150 SBIR/STTR Development Contracts Completed  

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