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SMI offers a wide range of MOCVD reactors (optionally Temperature controlled) for RDR or static deposition with or without plasma enhancement and/or showerhead height adjustability at sizes from 4” to 30”. Generally of all metal constructions, these reactors offer an array of port options for gas introductions and for door load lock interfaces, shuttered optical or other probe parts.
Reactor Chambers
Components
Nanowire & Nanowire CVD Filaments
Plasma Enhancement/Etch Options
Robotic & Manual Transfer Systems
Vapor Delivery System/Filter/Condensers
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