SMI offers a wide range of MOCVD reactors (optionally Temperature controlled) for RDR or static deposition with or without plasma enhancement and/or showerhead height adjustability at sizes from 4” to 30”. Generally of all metal constructions, these reactors offer an array of port options for gas introductions and for door load lock interfaces, shuttered optical or other probe parts.

Reactor Chambers

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SMI MOCVD SYSTEMS and Equipment 

Structured Materials Industries