MOCVD System Conversion
• III-V to Nitride
• III-V to Oxide
• Nitride to Oxide
Structured Materials Industries, Inc. provides specialized engineering services to Convert existing MOCVD equipment from one material system to another. SMI has a long history in manufacturing MOCVD tools and components and has now extended this capability to enable customers to economically adapt pre-existing MOCVD equipment from one material system to another. Examples are the conversion of excess III-V production MOCVD tools to meet oxide contact layer deposition needs, the conversion of excess nitride tool to pursue ZnO research and development, and conversion of excess III-V tools to II-VI materials. Alternatively, systems can be converted to incorporate plasma or UV enhancement. This service extends to tools from all MOCVD vendors as well as to enhancing existing home-built R&D systems.
Rotating Disc Reactors
• Emcore/Veeco
• Thomas Swan
• EMF
• Many others
Non-Rotating Disc Reactors
• Aixtron
• EMF CVD Equipment
• Many others
Homebuilt reactors/Systems
• Horizontal tube
• Vertical static
• Other
Gas Delivery Systems
• Bubbler, Sublimator, Gas, and Flash
…Evaporator Sources
• Purifiers
• Switching Manifolds
• Dopant Dilution Manifolds
• Pressure Control
Control Systems
• Manual Systems of obsolete Systems to
…Automated Systems with mimic ……
…screen/spreadsheet control format
Exhaust Systems
• Reducing atmospheres to oxidizing …atmospheres
• Oxidizing atmospheres to reducing atmospheres
• Other
New Process Environment Compliant Spare Parts
Components
Nanowire & Nanowire CVD Filaments
Plasma Enhancement/Etch Options
Robotic & Manual Transfer Systems
Vapor Delivery System/Filter/Condensers
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