Gas Panel Delivery Systems

SMI manufactures a full line of custom gas and vapor delivery systems for a variety of film depositions. This includes:

· Modular bubbler run / bypass / vacuum pressure controlled pneumatic valve manifolds

· Pressure and flow balanced fast process switching manifold

· ALD manifold

· Mass flow controllers

·  Pressure controllers

·  Dilution manifolds

· Mass transport monitors

· Temperature controllers

· Streamlined harnessed wiring

· Liquid source-flash evaporator and sublimator sources and manifolds

· Custom baths

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SMI MOCVD SYSTEMS and Equipment 

Structured Materials Industries