SMI designs and models all of its systems in Solid Works (TM) and use flow modeling in most cases to augment the designs. For an example of modeling capabilities and results, please see the attached paper.
Developing a complete tool model is mandatory for accurate, efficient and documented tool building and customer usage benefits.
In developing standard and custom CVD reactors of a great many styles flow and thermal modeling are very important. Modeling gives great insight into reactor performance and how to improve performance. This section presents several flow models of a variety of system designs.
MOCVD Process Model for Deposition of Complex Oxide Ferroelectric Thin Films
Nanowire & Nanowire CVD Filaments
Plasma Enhancement/Etch Options
Robotic & Manual Transfer Systems
Vapor Delivery System/Filter/Condensers