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Standard and Custom Rotation Control Assembly
SMI offers two feedback controlled rotation assemblies – first a DC serro system form generally used with transfer of wafers on a platter or for manual substrate transfer (loadlock less systems) – this is typically used for R&D and entry level production tools and uses the rotation control box shown at right. Second – an optically encoded, computer-driven system is used to control high-speed rotation and precisely controls platter position for pin-lift wafer transfer. This assembly is generally used with fully automated robotic wafer transfer system – maintains alignment for an automated computer driven deposition process.
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